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To: John Stewart who wrote (1121)4/22/1999 6:24:00 PM
From: Q.  Read Replies (1) | Respond to of 3661
 
Is there anything different about stripping photoresist off of a low K dielectric, as compared to stripping it off something else?

If it is, then low-K is a relevant issue for MTSN.

But I don't see how copper itself is relevant to MTSN, since in the metallization steps copper isn't etched photolithographically anyway -- it is polished off instead isn't it?

Or was the discussion of low-K in the context of something other than strip?