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To: Ian@SI who wrote (1124)	4/23/1999 5:15:00 PM
From: John Stewart	Read Replies (1) \| Respond to of 3661

Ian; Nice work, relooking at the conference call for Low K details. Look for Mattson to lock this up. Best Regards, John Stewart

To: Ian@SI who wrote (1124)	4/24/1999 1:30:00 AM
From: Nick Michell	Read Replies (1) \| Respond to of 3661

Ian, Thanks for transcribing this section of the call. I'm not a process engineer, but I know there are lots of candidates for low-k dielectric materials. I thought this an interesting comment "to remove an Organic resist with an exposed organic Low K material". Any leads on which large US Logic Manufacturer is working on this approach? (For instance, I've read that TI is working on porous silicon.) Also, my guess would be that organic low-k dielectics are still a long way from being put into production -- perhaps the generation beyond .13u Nick