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To: Ian@SI who wrote (1125)4/23/1999 1:35:00 PM
From: semi_infinite   Read Replies (1) | Respond to of 3661
 
Thanks for forwarding the replay. Brad Mattson said (I think it was his voice) claimed that their hot plate RTP approach is compelling compared to AMAT and Steag (sp?). However, no detailed explanations were given. I am no heat transfer expert but it seems to me the physics are the same, that both lamp and hot plate approaches use radiant heating. Has MTSN published test data that show faster heating and higher uniformity? I remember the AG RTP specs. being being fast and uniform, and AMAT still wiped them out.

CVD and strip business sound good.



To: Ian@SI who wrote (1125)4/23/1999 11:10:00 PM
From: Demosthenes  Respond to of 3661
 
Ian,

<<I might just listen again focusing on that aspect of the information.>>

I've listened to several CC's and I realize I should probably listen again twice more. It's SO easy to miss something substantial even when you're focused.

Thanks for your extra effort.

Ever, D