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To: Proud_Infidel who wrote (2882)6/1/1999 11:35:00 AM
From: Rob-Chemist  Read Replies (2) | Respond to of 5867
 
Obsidian and AMAT
I was actually more intrigued by AMATs purchase of Obsidian. My impression is that the Obsidian system is somewhat similar to the Teres system by Lam, in that a polishing slurry is not used. For AMAT to suddenly go in this different direction was rather surprising, particularly since they developed their slurry polishing technology in-house (ex., they could have bought IPEC or SFAM, but did not). By speculative inference, this suggests that Teres is doing quite well and AMAT wants to be able to compete with it in the near future.



To: Proud_Infidel who wrote (2882)6/1/1999 8:33:00 PM
From: Jong Hyun Yoo  Respond to of 5867
 
This is a great news...
Seems like LAM is making concerted efforts to win back
the market share in the dielectric etch. With the metal
etch being deemphasized due to advent of copper technology,
LAM needs to focus more on the oxide etch area..