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To: kapkan4u who wrote (82557)6/3/1999 1:38:00 PM
From: Paul Engel  Respond to of 186894
 
Kal Kan - Re: "If a material could be found that acts as both a diffusion barrier and a low-k dielectric, would the copper interconnect scaling be as good as the aluminum ones?"

Absolutely NOT.

If it is a dielectric - it is a NON-CONDUCTOR.

When a non-conductor takes up limited FIXED space that a CONDUCTOR should occupy, the net cross sectional area of the CONDUCTOR is reduced, and the benefits of reduced electrical resistivity are DIMINISHED.

Paul



To: kapkan4u who wrote (82557)6/3/1999 2:47:00 PM
From: Process Boy  Read Replies (1) | Respond to of 186894
 
kapkan - <If a material could be found that acts as both a diffusion barrier and a low-k dielectric>

What material do you have in mind? It'd be a neat trick.

PB