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General Lithography

An SI Board Since December 1996

Posts	SubjectMarks	Bans
1305	39	0

Emcee: Andrew Vance	Type: Unmoderated

Introduction Compact

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Reply	Message Preview	From	Recs	Posted
30	Andrew: Epitaxial silicon is deposited with a crystalline structure, the same c	WALLY THE SANDCRAB	-	12/30/1996
29	To All Interested - First, my apologies to James Word for repeating his answer	Andrew Vance	-	12/29/1996
28	Your question is by no means dumb. You are very intuitive and creative. What yo	Andrew Vance	-	12/29/1996
27	Wally and Doug, The epi is typically more highly doped than the bulk substrate	Dave Grady	-	12/23/1996
26	Rick: try "Microchip Fabrication: A Practical Guide to Semiconductor Proce	WALLY THE SANDCRAB	-	12/22/1996
25	could someone reccommend a text book or primer of semi manufacturing so that we	Rick Storm	-	12/21/1996
24	Doug, the use of epi is as a semiconductor, NOT as an insulator. If it is more	WALLY THE SANDCRAB	-	12/20/1996
23	Wally: I am getting in WAY over my engineering head, but besides beinga good i	----------	-	12/20/1996
22	Mr. Sandcrab, It sounds like what you are describing is a technique known as &	James Word	-	12/20/1996
21	Hi Doug: Let me add my two bits regarding epi. The epi layer was first used in	WALLY THE SANDCRAB	-	12/20/1996
20	How Do You Do, Sir: Wally mentioned your name to me and suggested I look at a	----------	-	12/20/1996
19	Andrew: Are you ready for a stunningly dumb question? I hope you're sittin	WALLY THE SANDCRAB	-	12/20/1996
18	I have yet to see an SEC filing, but I haven't checked in a while. When I d	Andrew Vance	-	12/20/1996
17	It is quite possible but I really view this as a long term investment, much lon	Andrew Vance	-	12/20/1996
16	Excellent response with great information. First, they are quite right that sil	Andrew Vance	-	12/20/1996
15	What about EUV vs. X-ray lithography? EUV would seem to have an advantage over	FJB	-	12/20/1996
14	Andrew, thanks for the excellent commentary. It's great getting an objectiv	Larry Fahy	-	12/20/1996
13	Andrew, great thread, somehow I got in up to my neck with jmar, do you feel the	Jim Green	-	12/20/1996
12	Home Page for FSII is fsi-intl.com Page has references to the cryogenic clean	Andrew Vance	-	12/20/1996
11	New cryogenic cleaning system is about to gain market acceptance and will be	David Loomis	-	12/19/1996
10	ISI Lithography Information Available. For those of you that are interested in	Andrew Vance	-	12/19/1996
9	The following are 6 excerpts from the press release. "Lithography is one	Andrew Vance	-	12/19/1996
8	If your question is what type of reticles/masks are used in x-ray litho, the fo	Andrew Vance	-	12/19/1996
7	What are they using for masking in x-ray litho? Wally	WALLY THE SANDCRAB	-	12/19/1996
6	Andrew, I certainly don't want sound like I'm hyping a stock but I woul	Larry Fahy	-	12/19/1996

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