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General Lithography
An SI Board Since December 1996
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1305 39 0
Emcee:  Andrew Vance Type:  Unmoderated
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55 By the way, could you comment on the last thing I posted on the SVGI thread. IFJB-1/10/1997
54 Hey Andrew, IBM just announced a cool, free, patent search service today, so heFJB-1/10/1997
53 193nm tool is indeed a small field tool and Sematech has taken delivery on thisAndrew Vance-1/9/1997
52 Re: ISI's Step and Scan Patent. In your Juicy Rumor message you mention thJames Word-1/9/1997
51 The way this is written, it seems to indicate a pure scanner. I will inquire wiAndrew Vance-1/9/1997
50 Isn't this a step and scan tool? Litigation ahead? From a press release datFJB-1/9/1997
49 I had the opportunity to look very closely at the MRS Tech stepper at Semicon 2Andrew Vance-1/9/1997
48 Do you know MRS Technology? Web site is mrst.com They've been focused C Dunn-1/9/1997
47 If UTEK were acquired by AMAT, I do not beleive we will see any eefect on ASMLFAndrew Vance-1/9/1997
46 Andrew, Thanks for all the info! I hold both UTEK and ASMLF, so I'm hopinDr. Bob-1/9/1997
45 ****JUICY RUMOR****** This rumor originates with me, personally. So if it doesAndrew Vance-1/9/1997
44 They are not abandoning EUV research, to the best of my knowledge. There is stiAndrew Vance-1/7/1997
43 Hello again Andrew, Thanks for your comments on the P-GILD work. I just saw Ian@SI-1/7/1997
42 The company is called Ionic Corp or Inc. They are not publicly listed or tradeAndrew Vance-1/7/1997
41 Andrew: With respect to CMP, which is sort of a lithography related thing, in tWALLY THE SANDCRAB-1/6/1997
40 I think I understand where you are coming from but I would have the folowing quAndrew Vance-1/6/1997
39 With respect to very narrow line widths, do you think that near-field optics wRobert D. Kuchta-1/6/1997
38 Thanks for the input. I will check it out.Andrew Vance-1/3/1997
37 Andrew: thanks for the reply and the help. I have an idea you might want to loWALLY THE SANDCRAB-1/3/1997
36 The answer may be rooted in the price of the equipment, floorspace it occupies,Andrew Vance-1/3/1997
35 FYI-PLAB posting of mine from another thread Andrew Vance-1/3/1997
34 Andrew, Many thanks for taking the time and effort to help educate me and oIan@SI-1/3/1997
33 The following is a reply I posted elsewhere. By the way, please note that SUBMAndrew Vance-1/3/1997
32 Andrew, I know it's off topic, but I'll ask anyway: What do you hear, WALLY THE SANDCRAB-1/3/1997
31 Sorry for the "glass" slip. You are correct and I am duly admonished.Andrew Vance-12/30/1996
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