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Technology Stocks : General Lithography

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To: Katherine Derbyshire who wrote (896)	3/12/1998 11:28:00 AM
From: Volsi Mimir	Read Replies (1) of 1305

KD Good day In your brief of your last article (portion below)you mentioned gates and sharpness (electron dissipation (my comment)).Here is a link to Cymer and BillyG has a new news item on Hatachi's tools.Does Hatachi's electron microscopic tool HD 2000 address the metrology issue that one could tell if that (bleeding) is happening. Message 3684205 <<<Briefly, smaller transistors (below about .10 micron channel length) start to run into physical limitations because the insulator starts to "leak" electrons as it gets thinner. Too much leakage, and the switching behavior is lost. To maintain acceptable properties, new insulator materials are needed, but oxide (SiO2) is familiar and easy to work with. Other materials are likely to be much tricker, and require substantial R&D. Likewise, for very short channels, current from the source and drain electrodes starts to "bleed" into the gate region, causing the transistor's switching behavior to round off, rather than being sharp. (Difficult to explain without knowing your background.) New transistor designs are one way to solve this problem, new materials are another.>>>> eddyb

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