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Technology Stocks : Cymer (CYMI)
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To: George Coyne who wrote (18413)7/10/1998 1:57:00 PM
From: FJB  Read Replies (2) of 25960
 
G.W.,

RE:New lasers and masks.

Currently, PSMs are not being used widely in production.
Message 4640116 Based on what I've been reading, high NA stepper/scanners will be used to resolve 0.18 features which means using a 5010 model laser or better. The last 0.03æm might be accomplished through the use of PSMs, but currently their are almost no steppers/scanners out there with NAs of 0.68 or greater. So there will be an upgrade cycle in which high NA tools will need to be bought and those will be sold with the 5010 or Orion. Also, based on what I recall of a James Word post, PSMs aren't a good option for logic parts.

Bob
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