To: Donald Kirchner who wrote (499 ) 6/1/2000 10:31:00 AM From: Paul Lee Read Replies (2) | Respond to of 677
ATMI Delivers Complete Low-k Materials Management; Industry's First Complete Solution in Rapidly Growing Sector DANBURY, Conn.--(BUSINESS WIRE)--June 1, 2000--ATMI, Inc. (Nasdaq:ATMI), today announced it has developed and made available the semiconductor industry's first comprehensive Low-k Materials Management Solution. This comprehensive solution includes organosilane chemical vapor deposition (CVD) low-k chemicals, fabrication plant-wide bulk chemical delivery systems, low-k life-safety leak detectors, CVD low-k abatement systems, and comprehensive technical support and service. The initial system is being delivered and qualified by a leading communications chip company. Low-k materials are used in integrated circuit ("chip") interconnect structures and are the dielectric insulators that separate the conductive wires. For leading-edge chips using sub-0.18 micron wire spacing, low-k insulators improve chip performance by increasing signal speed, reducing power consumption, and minimizing signal noise. ATMI designed and developed the semiconductor industry's first complete line of Low-k material management solutions in support of IC manufacturers' fabrication of copper damascene interconnect. By allowing customers to more closely focus on critical process steps including film fabrication, uniformity, and throughput, the integrated low-k materials management system will enable IC manufacturers to more quickly ramp their low-k processes. Dr. Neil Hendricks, ATMI's Chief Technologist and Director of Low-k Technology, said, "ATMI is the only company in the industry with a complete solution for Low-k CVD materials management. By entering in the beginning of the low-k evolution, we believe ATMI can establish a stronghold for CVD low-k solutions. Key technology decisions in the low-k world will happen before the year's end. Because ATMI has addressed and solved CVD low-k purity, delivery, sensor, and abatement issues, we see ATMI becoming a crucial player in the low-k marketplace. ATMI is enabling customers to focus on low-k film fabrication, while we combine our product lines to provide management of the chemicals flowing into and out of the CVD low-k tool, backed with strong, global technical service." The low-k dielectric equipment market is almost doubling year over year. From a zero base in 1998, GartnerGroup's Dataquest projects this market to reach $444 million by 2004, making it one of the fastest growing segments of any in the semiconductor industry. ATMI provides specialty materials and related equipment and services to the worldwide semiconductor industry. Related equipment includes materials packaging systems, delivery systems, sensors, and a full line of environmental equipment. Services include materials management, equipment servicing, and thin film deposition.