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To: Ram Seetharaman who wrote (2792)	5/2/2000 10:39:00 AM
From: Ram Seetharaman	Read Replies (1) \| Respond to of 2946

SVGI gets another order! :38 am Eastern Time Company Press Release Silterra Places Second Multiple System Order for SVG AVP Furnaces SAN JOSE, Calif.--(BUSINESS WIRE)--May 2, 2000--Silicon Valley Group (Nasdaq:SVGI - news) announced today that Kulim, Malaysia's newest full-service semiconductor manufacturing facility, Silterra Malaysia Sdn. Bhd., placed an additional seven-system order for SVG's advanced vertical processors (AVP). It is the second multiple system order this year for the company's advanced vertical thermal reactors from Silterra. SVG previously received a 10-system order from Silterra in January 2000. This recent order spans annealing, gate oxidation, SiN and Poly CVD systems, and through a licensing agreement, enables Silterra to copy exactly LSI Logic's proven 250 nm and 180 nm gate geometry processes. ``SVG was selected for Silterra's rapid production ramp up because we offer world class system performance, reliability and low cost of ownership,'' said Jeff Kowalski, SVG Thermal Systems president. ``This order, as well as Silterra's initial multiple system order, underline the increase of SVG's presence in Asia.'' ``Our ability to offer superior customer turn-key support and provide low-cost process flexibility and extendibility over competing products was a major factor in this success and our continued success in the region,'' commented Papken Der Torossian, SVG chairman and CEO. ``This trend is further evident by the increased repeat business we have received from our customers.'' The AVP system offers advanced thermal processing capabilities for 200mm production. The system's atmospheric control results in minimum native oxide growth during push/pull. Its model based temperature control accurately controls wafer temperature at each wafer and through the wafer load. About Silterra Malaysia Sdn. Bhd. Founded in December of 1997, Silterra Malaysia Sdn. Bhd. is a full-service semiconductor-manufacturing provider that offers customers leading-edge process technologies. Silterra's factory will be operational in 3Q 2000 and fully-qualified 1Q 2001, ramping to 30,000 eight-inch wafers per month by 2002. Silterra will have immediate access to LSI Logic's capacity on the license technologies to qualify and develop customers. Silterra is headquartered in Kulim, Malaysia, with a sales and marketing office in Sunnyvale, California. For further information on Silterra or its services, visit www.silterra.com. About Silicon Valley Group Silicon Valley Group (Nasdaq:SVGI - news) is a leading manufacturer of automated wafer processing equipment for the worldwide semiconductor industry. The company designs, manufactures and markets technically sophisticated equipment used in the primary stages of semiconductor manufacturing. Its products include photolithography exposure tools; photoresist processing equipment; oxidation, diffusion and low-pressure chemical vapor deposition processing systems; atmospheric pressure chemical vapor deposition systems and precision optical components and systems. For more information, visit svg.com. Forward-looking Statement Disclaimer: The matters discussed in this news release include forward-looking statements made by the Company's chairman and CEO and Thermal Systems president that involve risks and uncertainties including but not limited to economic conditions, industry conditions, trade environment and other risks discussed more fully in filings by the Company with the Securities and Exchange Commission. Reference is made to the Company's most recent Forms 10-K and 10-Q, which detail such risk factors. Contact: Silicon Valley Group Werner Rust, 408/467-5949 rustw@svg.com Nancy Szymanski, 408/467-5870 (Investment Relations) szymansn@svg.com or Silterra Malaysia Sdn. Bhd. Steve Della Rocchetta, 408/530-0885 sdr@silterra.com or DVS Communications for Silterra Stacey Gaswirth or Katie Olivier, 972/774-9850 sgaswirth@dvscom.com kolivier@dvscom.com or Mathews & Clark Communications Stew Chalmers, 650/815-1006 schalmers@mathewsandclark.com