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To: semiconeng who wrote (108481)	8/26/2000 2:08:41 PM
From: Scumbria	Respond to of 186894

Semicon, Thanks for the info. I will ask those questions at work. Scumbria

To: semiconeng who wrote (108481)	8/26/2000 2:14:23 PM
From: Dan3	Read Replies (1) \| Respond to of 186894

Re: I know all about the amount of intensive labor that it takes to maintain the type of dry etch rates that this type of process demands for logic circuits, I lived it for awhile. And believe me, it is neither easy, or cheap, or high yielding If you say so. By the way, there are now 4 listings on pricewatch for 1.1GHZ Athlon/Motherboard combos, but still not a single listing for a 1.13GHZ P3. And the Athlon won't be officially released for 2 days. Maybe Intel should have at least attempted something other than "Cheap and Easy". Too late now. Maybe in a year or so. Dan

To: semiconeng who wrote (108481)	8/27/2000 2:52:25 PM
From: THE WATSONYOUTH	Read Replies (1) \| Respond to of 186894

I'm not saying you don't make some of them, but the "reactive Ion Etchback" process that IBM described, is more commonly known as "Dry Etch". Dry Etch happens to be my area. If they are employing Dry Etch Techniques, to etch back the interconnect layer, then they are going to have lots of problems controlling the Etch Rates to insure that they don't break trough the Poly Layer. I know all about the amount of intensive labor that it takes to maintain the type of dry etch rates that this type of process demands for logic circuits, I lived it for awhile. And believe me, it is neither easy, or cheap, or high yielding. Go talk to your dry etch process engineer, and see how much he/she likes your process. You posted a link, which, although very dated, at least outlines how IBM processes this local interconnect level. I assume you read it. By your comments, it is clear you still don't have even a fundamental understanding of the actual described process flow and thus could never have actually run this process. I suggest you go back and read it again and understand it before you claim to know how easy, cheap, or high yielding the process is. THE WATSONYOUTH