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To: semi2000 who wrote (9842)5/20/2001 1:03:04 PM
From: Cary Salsberg  Read Replies (1) | Respond to of 10921
 
Phase shifting and OPC have been used to extend hardware platforms to smaller linewidths which are below the wavelength of the laser output. This adds value to the hardware because it extends the time it operates at the leading edge.

Hence, I see NMTC technology as complemetary to the lithography tool makers. I believe Phase shifting and OPC process technology have been developed by both chip makers and tool makers. One of NMTC directions is to move consideration and design for this process technology into computer aided circuit design.