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To: fingolfen who wrote (135968)5/23/2001 3:15:39 PM
From: Dan3  Read Replies (1) | Respond to of 186894
 
Re: I honestly don't think Intel is actually using 193nm steppers for 0.13 micron...

You guys are way, way, way, too much.

6 months ago AMD was planning on using 248nm steppers for .13 and you were all crowing about how Intel's move to 193nm steppers for .13 meant they would have a more robust .13 process out of the gate. You and semicoeng and Elmer were all saying that phase shift required too much setup time and AMD was showing how dumb they were because AMD felt they could get a decent .13 out 248nm equipment using phase shift. Then AMD said they were going to delay implementation of .13 to the end of this year to get a better process and one of the reasons (along with implementing SOI) was so they could use 193nm equipment for parts of their .13 process. This despite Sanders having stated earlier that cleaning and polishing was what AMD saw as the .13 challenge, not lithography.

It almost looked for a while like some of you actually knew something.

Now we get this barrage of posts saying "Intel never planned to use anything but phase shift on 248nm steppers for the first implementation of .13" and "phase shift on 248 if fine for Intel .13" (just not AMD .13, I guess).

Swell, just keep making it up as you go along. Whatever. Your dog told you, and the cat backed him up.

Dan