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To: mopgcw who wrote (956)9/8/2001 2:33:58 PM
From: John Finley  Respond to of 1227
 
Thanks, mopgcw

'Course, now that I think about it, photolith doesn't use vacuum anyway except maybe to hold down the wafers. Other e-beam things like SEMs probably use turbos because of the faster startup.

I guess the main roadblock for cryos in semi fab would be from a migration to more CVD processes and wet plating, and less sputtering and evaporation. I don't where the industry is moving in that regard. In my field we use cryos, but we're only a small, deeply disturbed cult <g>.

JF