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To: dale_laroy who wrote (161640)3/9/2002 9:28:28 AM
From: semiconeng  Read Replies (1) | Respond to of 186894
 
90nm with 248nm Steppers......?
siliconstrategies.com

In all fairness, he just says that they hope to manufacture at 90nm using 248nm laser lithography tools. The question this brings up is, at what point does AMD make the decision to abandon this attempt and begin installing 193nm laser lithography tools for production?


Hope.... is a great thing.... but IMO, it ain't gonna happen.... Unless you want you P.E.'s to be standing in front of the Steppers 24x7, making constant Focus/Exposure Adjustments... Then the throughput would go down. The 248nm Stepper lens quality just isn't up to it.

Intel wanted 193nm Stepper for 0.13u, but has stated that they are using the 248nm Stepper for it. Speculation in the Tech press is that they are using Phase shift to do it. If so, I don't believe that Phase Shift will be able to push the equipment for a second Process. Just my opinion.

And I would guess that the point AMD will ummmm.... wake up and smell the coffee, will be exactly sync'd to the moment when they get their hands on a 193nm Stepper. I hear it's that much better....

:-)

Semi