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To: Elmer who wrote (162558)3/19/2002 11:46:14 PM
From: burn2learn  Read Replies (1) | Respond to of 186894
 
I would say that is a very glossed over look at defect density, and little information exist in the that article.



To: Elmer who wrote (162558)3/20/2002 11:08:19 AM
From: Ali Chen  Read Replies (2) | Respond to of 186894
 
"comparable numbers of particles tend to fall on wafers of either size. The absolute number of particles will be about the same for both"

This is an utter BS I ever heard of.

- Ali


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