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To: burn2learn who wrote (162561)3/19/2002 11:57:33 PM
From: Elmer  Read Replies (1) | Respond to of 186894
 
I would say that is a very glossed over look at defect density, and little information exist in the that article.

Sure it's glossed over but there's a point there. A large number of the defects are from particles, about 70% if I remember correctly. Those that come from the equipment will be the same number for either 8" or 12". Same number across a larger wafer means lower defect density and higher yields.

EP


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