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To: fingolfen who wrote (163764)	4/10/2002 3:08:56 PM
From: Elmer	Respond to of 186894

So is TSMC using SiLK for their low-K back end or some other flavor? The international roadmaps I've seen show low-k getting pushed out by a generation or so because of these types of integration issues. I'm not a process kinda guy but I'm sure Yousef will know. EP

To: fingolfen who wrote (163764)	4/10/2002 4:49:19 PM
From: Yousef	Read Replies (1) \| Respond to of 186894

Fingolfen, Re: "So is TSMC using SiLK for their low-K back end or some other flavor? The international roadmaps I've seen show low-k getting pushed out by a generation or so because of these types of integration issues." Yes ... Low K is causing many companies to slip their .13um schedules. IBM was the "prime mover" behind SiLK ... But even they couldn't overcome the yield and reliability problems. Foundries are using Black Diamond (AMAT) and Coral (Novellus). Even these two candidates are not there yet. FSG is a much surer approach, however it has higher k value (~3.8). Make It So, Yousef