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To: Ali Chen who wrote (86278)	8/2/2002 1:55:53 PM
From: Yousef	Read Replies (2) \| Respond to of 275872

Ali, Re: "What do you expect from me, a process qualification dissertation ..." I really don't expect much from you in "process expertise" ... That's why I was "correcting" you about your faulty statement. Yield problems usually are not due to a tool not meeting specifications. Tools meeting specifications are well monitored and technicians/engineers need to be "fired" if this is the problem. More likely causes are subtle issues when integrating various process modules (etch/dep/CMP/Cleans/litho/...) together. Some unintended interaction causes the yield problem. Hope this helps. Make It So, Yousef