To: StanX Long who wrote (9234 ) 4/2/2003 2:32:13 AM From: StanX Long Read Replies (1) | Respond to of 95640 Here is another good sign, note the bold, Stan. :0) Tegal Receives Tool Upgrade Order for Expanding FeRAM Capacity Tuesday April 1, 9:00 pm ET Leading Japanese FeRAM Producer Expanding Capacity to Full-Scale Production biz.yahoo.com PETALUMA, Calif.--(BUSINESS WIRE)--April 1, 2003--Tegal Corporation (Nasdaq:TGAL - News) today announced that it has received an order from a leading Japanese semiconductor manufacturer for an extensive system upgrade of one of its advanced etch systems. The upgrade is needed to meet rapidly expanding production requirements for advanced non-volatile memory devices known as Ferroelectric Random Access Memory (FeRAM). The upgrade, scheduled for installation in July, includes extensive productivity enhancements to the existing system and the addition of a second production chamber. When completed, the upgraded tool will be transferred into mainstream manufacturing alongside other Tegal advanced etch systems already being used in FeRAM production. This customer is one of the earliest companies to develop and commercialize FeRAM technology. "We see this order for a system upgrade as a clear indication of a growing market for FeRAM devices," said Jim McKibben, Tegal's vice president of worldwide marketing and sales. "The requirement for non-volatile memory solutions like FeRAM is being driven by consumer demand for a host of mobile and wireless devices such as video phones, PDA's and smart cards. As a result, consumer electronics manufacturers are specifying energy efficient replacements for DRAM, SRAM and Flash that offer high density and excellent read/write characteristics. Because FeRAM does not require constant refreshing it is an ideal choice in many mobile and wireless applications. Our dedication to delivering continued process and equipment breakthroughs to FeRAM chipmakers worldwide will help Tegal maintain its place as a leader in FeRAM etch and enable our customers to continue to offer new and innovative products to end-users." Tegal is the leader in providing etch solutions to this market, having sold advanced etch systems to ten of the thirteen device suppliers with active FeRAM programs. The worldwide market for FeRAM devices is estimated to reach $10 Billion by 2006, according to a leading supplier presenting at the recent 15th International Symposium on Integrated Ferroelectrics Conference held on March 10, 2003 in Colorado Springs, Colorado. The system upgrade includes Tegal's patented technologies for the control of wafer temperatures during etching, which improves uniformity and delivers tighter process control. The upgrade is available in configurations to support both low temperature resist and high temperature hard mask process flows. The patents embodied in the system upgrade are included in a portfolio of patents surrounding FeRAM etch processing that Tegal has put into place in the U.S. and in several foreign countries over the past eight years. Fifteen out of Tegal's 78 patents involve either an apparatus or a methodology that is essential in the development and production of such devices. In addition to its 48 United States patents and 30 foreign patents, Tegal has 60 additional patents pending. Safe Harbor Statement The statements in this news release are forward-looking statements that involve a number of risks and uncertainties. As discussed in Tegal's annual report on Form 10-K for the fiscal year ended March 31, 2002, assumptions relating to the foregoing involve judgments with respect to, among other things, the ability of Tegal to successfully implement its business strategy; future economic, competitive and market conditions, including those in Europe and Asia and those related to Tegal's strategic markets; whether the products offered by Tegal will continue to achieve customer acceptance, and future business decisions, all of which are difficult or impossible to predict accurately and many of which are beyond the control of Tegal. Although Tegal believes that the assumptions underlying the forward-looking statements are reasonable, any of the assumptions could prove inaccurate and, therefore, there can be no assurance that the results contemplated in the forward-looking statements will be realized. In light of the significant uncertainties inherent in the forward-looking information included herein, the inclusion of such information should not be regarded as a representation by Tegal or any other person that Tegal's objectives or plans will be realized. Tegal undertakes no obligation to revise the forward-looking statements contained herein to reflect such events or circumstances after the date hereof or to reflect the occurrence of unanticipated events. About Tegal Tegal Corporation, headquartered in Petaluma, California, is a leading designer and manufacturer of plasma etch and deposition systems used in the production of smart cards, opto-telecom devices, integrated circuits (ICs), and other related microelectronics devices. Both etching and deposition are key process steps and must be repeated multiple times in the production of these devices. Tegal markets and services its systems in all major IC-producing regions of the world. More information is available on the Internet at: www.tegal.com.