To: Kirk © who wrote (986 ) 7/13/2005 2:23:02 PM From: Proud_Infidel Respond to of 43407 ASML, Canon, Nikon tip immersion roadmaps Mark LaPedus EE Times (07/12/2005 9:09 PM EDT) SAN FRANCISCO — During the Semicon West trade show, ASML Holding NV, Canon Inc. and Nikon Corp. separately tipped their roadmaps for immersion lithography. The three companies are racing each other to develop 193-nm systems with hyper numerical apertures (NA) of 1.3 for use in chip designs at 45-nm and below. Japan's Nikon recently rolled out what the company claimed was the world's first hyper NA immersion system for volume chip production at 55-nm and R&D at 45-nm. The NSR-S609B from Nikon (Tokyo) is a 193-nm immersion, "tandem-stage" lithography scanner with a hyper NA of 1.07. At Semicon on Tuesday (July 12), Nikon disclosed some details about its next-generation machine. Dubbed the S6xx, the 193-nm immersion lithography tool from Nikon is said to feature a "tandem-stage" design and a multi-axial catadioptric lens with an NA of 1.3. Geared for production at the 45-nm node, the 4X machine will have a 26- x 33-mm field size. Shipments of the tool are slated for late 2006 or early 2007. Meanwhile, as expected, ASML (Veldhoven, the Netherlands) rolled out the XT1700i, a 193-nm immersion tool with a hyper NA of 1.20 (see July 6 story). ASML is also quietly developing the XT1900i, a 193-nm, immersion system with a hyper NA of 1.3. Like the XT1700i, the new tool is reportedly based on the company's Twinscan "dual-stage" design and a uni-axial catadioptric lens, according to sources. ASML was originally supposed to ship the XT1900i in late 2007, but the company is reportedly accelerating that schedule, sources said. At Semicon, Canon also tipped its first immersion tool, a 193-nm machine with a dual-stage design and a hyper NA of 1.3, said Damian Thong, an analyst with Macquarie Securities Japan Ltd. (Tokyo). Canon (Tokyo) is expected to ship the so-called FPA7000 machine in January of 2007, said Thong, who attended a briefing given by the company at Semicon. Unlike ASML and Nikon -- which are taking incremental steps towards hyper NAs of 1.3 -- Canon is moving from "dry" 193-nm tools to immersion with a hyper NA of 1.3, he said. Thong indicated that ASML and Nikon are ahead in the race. "It was perceived that ASML was leading in immersion," he said. "It now appears that Nikon is toe-to-toe and eyeball-to-eyeball with ASML." One expert downplayed the recent announcements in immersion, saying that the technology has not proven itself in the real world or in production fabs -- yet. "The Nikon and ASML immersion tools are on schedule as we had expected," said Peter Silverman, a fellow and the director of capital equipment technology strategy for Intel Corp. (Santa Clara, Calif.) "There really isn't any story until someone reports some statistically significant data on products," he said. "I suspect that will not occur for several more months."