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To: dr_elis who wrote (1274)10/18/2006 10:42:47 PM
From: FJB  Read Replies (1) | Respond to of 43480
 
I-line are the cheapest, least advanced tools and are not immersion. They use a Hg lamp as the light source and have low-NAs. 1400i, 1700i and 1900i are all ArF based immersion scanners. The immersion scanners probably sell for 4-5 times the cost of an i-line tool.