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To: Apple12 who wrote (5608)	10/22/1997 12:24:00 PM
From: Ian@SI	Read Replies (1) \| Respond to of 25960

Does anyone know what type of lasers ETEC uses. I found this article today... Note that most steppers are either 3X or 5X reduction steppers. One of the things that this means is that the feature size on the mask will be either 3X or 5X the device feature size. DUV lasers are not required to make masks for 0.25u device features. "The Alta 3500 will enable the Austin site to manufacture 0.25-micron and below device generation masks and reticles in production volume," Moneta said. Ian