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Technology Stocks : General Lithography -- Ignore unavailable to you. Want to Upgrade?

To: Doug Neubauer who wrote (672)	10/29/1997 11:29:00 AM
From: Scott Brooks	Read Replies (2) \| Respond to of 1305

On a similar note, I seem to recall someone posting about a book - essentially "what makes a fab go" for non-engineers and I recall they indicated that Amazon had it. I have searched and searched both sites (here & AMZN) to no avail? Does this ring any bells? TIA Scott

To: Doug Neubauer who wrote (672)	10/31/1997 1:42:00 PM
From: FJB	Read Replies (1) \| Respond to of 1305

Doug, Today is your lucky day. I happened to find the SPIE Handbook of Microlithography on the web and they have the whole chapter on E-Beam lithography up on the site for your free reading pleasure. Enjoy! cnf.cornell.edu Bob

To: Doug Neubauer who wrote (672)	11/12/1997 11:50:00 AM
From: Andrew Vance	Respond to of 1305

I would check on the following title and see when the most recent edition was published. Introdcution to Microlithography edited by L.F. Thompson, C.G. Wilson and M.J. Bowden and published through the American Chemical Society. This book has been used as the text for numerous SPIE short Courses on lithography. My book is dated 1983 so it is an ancient tome. Another possibility could be to inquire at both Solid State Technology and Semiconductor International Magazines for recent issues on E-Beam lithography. While topics can be covered in each month's magazine articles, they dedicate at least one issue per year to lithography like E-beam. There is also a magazine published called Microlithography that you might inequire getting a free subscription to which will keep you at the forefront of information. Good Luck Andrew FWIW-I own the two books listed in the following link and think the Van Zant book is geared better to the non engineer while the Tauber book is definitely for a hardcore technologist. exchange2000.com The SPIE handbook mentioned on line is pretty decent which brings to mind that SPIE has annual symposiums where the proceedings are routinedly published. They run about $30 per proceeding and there are sessions devoted entirely to e-beam/laser/x-ray lithography.