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To: Patient Engineer who wrote (7392)10/30/1997 9:24:00 PM
From: FJB  Read Replies (3) | Respond to of 25960
 
Both Intel and TI are making large investments in DUV tools now and in '98. Intel is buying DUV(248nm laser) tools from both Nikon and SVGL because of their extendibility to 0.18&#181 drawn gate lengths. TI has a process called C07a going into pilot production in Q1 '98 with drawn gate lengths of 0.21&#181 of and plans for a process called C07b(0.18) to enter pilot production in Q4 '98.

The only limitation on the DUV tool market is the ability of stepper manufacturers to build them. Demand of 700 units vs. production 500 of units. With the requirement that early '99 tools get their lasers in late '98, the picture is quite vivid.

Bob



To: Patient Engineer who wrote (7392)10/31/1997 8:15:00 AM
From: Mason Barge  Respond to of 25960
 
<< Likewise my impression is that Intel is using older i-line systems for now>>

This is certainly true. However, the whole impetus for the question was Intel's announcement that it would refit the Digital Hudson fab for .25um using Micrascan III equipment. The steppers (and LASERS!) are now on order.


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