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To: Maxwell who wrote (8142)	11/4/1997 7:10:00 PM
From: BillyG	Respond to of 25960

I just copied the Lambda press release. I suspect that the product is not ready and is not shipping, unless it is an evaluation unit. If Lambda, Komatsu, or any other would-be CYMI competitor ships a production laser for use in a production system, i'm certain they will paper the wire with press releases. Can you imagine being the first fab manager to buy a non-CYMI DUV tool for actual production? .25 micron is difficult enough without throwing another variable into the equation.

To: Maxwell who wrote (8142)	11/4/1997 8:02:00 PM
From: BillyG	Read Replies (2) \| Respond to of 25960

The November 1997 issue of Solid State Technology has an article entitled "Lithography at an Inflection Point" on p. 127. It discusses the future of optical vs. x-ray lithography. The authors mention that optical lithography will begin to be impractical at about .13 micron. Do you agree? Another article about lithography process control appears on p. 141, and it was written by the guy who manages the Lithography Tools Department at AMD. It is obvious from the article that he has spent a lot of time with DUV systems.