Silicon Investor (SI) -- The First Internet Community

STOCKTALK

We've detected that you're using an ad content blocking browser plug-in or feature. Ads provide a critical source of revenue to the continued operation of Silicon Investor. We ask that you disable ad blocking while on Silicon Investor in the best interests of our community. If you are not using an ad blocker but are still receiving this message, make sure your browser's tracking protection is set to the 'standard' level.

Technology Stocks : Cymer (CYMI) -- Ignore unavailable to you. Want to Upgrade?

To: BillyG who wrote (8159)	11/4/1997 8:47:00 PM
From: Peter V	Read Replies (2) \| Respond to of 25960

Hi BillyG! Your last post concerns me a bit about CYMI's long-term prospects. What is the next progression point for lithography beyond 0.25 micron? I thought it was 0.18 micron. If so, that will give CYMI's optical lasers at least one more process iteration, won't it? But assuming the author is correct, can 0.25 and 0.18 micron processes be done with x-ray lithography? If so, is x-ray lithography far enough along to be implemented in manufacturing? Thanks for your thoughts.

To: BillyG who wrote (8159)	11/5/1997 1:10:00 AM
From: Maxwell	Read Replies (2) \| Respond to of 25960

BillyG: <<"Lithography at an Inflection Point" on p. 127. It discusses the future of optical vs. x-ray lithography. The authors mention that optical lithography will begin to be impractical at about .13 micron. Do you agree?>> Yes I agree. If you have a wavelength source less than .13um there is no known lens that can focus this wavelength. However at .15um focusing is still achievable. To achieve less than .13um with .198um-.15um wavelength source you need to apply some tricks. The trick is to etch into the .15um resist (done with conventional optical lithography) during the normal plasma etch of poly, oxide, metal, etc. This trick has been done and excellent resolution has been achieved. When you go to x-ray life is miserable and the cost goes up exponential. I'm not sure if <0.1um is even feasible. Maxwell