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To: FJB who wrote (1310)	11/13/1997 4:47:00 PM
From: Ian@SI	Read Replies (2) \| Respond to of 2946

Bob, Very nice find. I especially liked the last 2 paragraphs of the story... SVGL said the three other Korean chip makers -- Samsung, Hyundai and LG Semicon -- have installed its Micrascan systems in their development fabs. So far the three firms haven't followed up with any production orders. Samsung split its lithography order between Nikon Corp. and ASM Lithography for its latest fab in Austin, Tex. Samsung has also put $10 million up-front payment in the special project at Massachusetts Institute of Technology to develop a 193-nanometer excimer laser deep UV tool using the SVGL step-and-scan platform, as previously reported by Semiconductor Business News. Three other U.S. chip makers and a second unidentified Korean firm also partners in the 193-nm project.