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To: Paul Engel who wrote (40446)11/15/1997 8:47:00 PM
From: Lee Penick  Read Replies (3) | Respond to of 186894
 
Paul,

Does AMAT make the steppers, or some other company?

I believe I read it, but can't remember, are all the die on one wafer being shot with light at once, or is one die exposed at a time?

What type of mechanical device (or otherwise) can move a wafer in 0.02 micron increments to line it up properly?

The size reduction of the pieces-parts on the wafer is limited by the wave length used as a light source in the stepper. If I understand it correctly, we are approaching dimensions now that are the same as the wave length...meaning no more reduction from these current light sources/lamps. The article mentioned the pros and cons of various future possibilities. What do you think holds the most promise for the next 5 to 10 years?

If this new technology doesn't pan out in the next several years, are we limited to 0.10 microns as far as cost reduction is concerned?

Does this also limit the speed increases that are possible? (I don't know the factors involved in making speed enhancements) I assume size and component proximity is just one of them.

If Intel doesn't make the manufacturing equipment, are they simply better chip designers and volume manufacturers than the competition? (we already know they have marketing locked up with the "bunny people"!)

IF AMD has a yield problem, some part of their highly complex manufacturing process is not working properly. When equipment of that complexity does not operate properly, you generally call in the manufacturer and pay big bucks per hour to get it straightened out. Why would AMD be unable to do this? (I'm missing part of the picture here)

Have a good weekend in Sunny CA.

Lee




To: Paul Engel who wrote (40446)11/16/1997 6:27:00 PM
From: Jim McMannis  Read Replies (1) | Respond to of 186894
 
Paul,
Perhaps in your retirement you will write a book on the processes of making cpu chips. I don't know if it would be a best seller or not but I'd sure buy a copy.
Jim



To: Paul Engel who wrote (40446)11/17/1997 7:31:00 PM
From: Aaron Cooperband  Read Replies (1) | Respond to of 186894
 
Paul -

Excellent explanation of the how allignment works in a stepper. One question:

Re: "the wafer stage is minutely adjusted (x, y and theta) to bring the two images into proper alignment"

I can understand the need for x, y, and z axis movements, but shouldn't you include twists as well, such as rotatating the wafer around any of these axes? (could this be what theta refers to?, but then you're missing the z axis!)

Although wafers are exceptionally flat, there has to be some adjustment between the stage/wafer and the stepper in this manner, doesn't there? It seems to me that there are 6 types of movement to worry about.

Aaron