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To: Maxwell who wrote (9836)	11/16/1997 1:03:00 AM
From: Zeev Hed	Read Replies (1) \| Respond to of 25960

Maxwell, sorry, I was sure that the CVD was down through a mask covering the non trench oxide. Now I understand the process. Your replace with a single planarization step the masking and etching (or other mask removal) step, and since probably you may need to pmanarixe the coverd metal anyhow, you save two steps. Make sense. However, I would have assumed that in order to etch the trenches, you would use a mask anyhow which sooner or later will have to be removed, thus dipping first in the sensitizing agent (with the trench making mask still on) and then in the electroless bath (still with the mask on) will actually save the relatively lengthy process of CVD'ing 500 angstroms without adding steps, since the mask removal step is still necessary after the etching of the trenches. Thanks for the clarification. Zeev