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To: Tulvio Durand who wrote (11327)12/10/1997 12:24:00 PM
From: Mr. Aloha  Read Replies (1) | Respond to of 25960
 
SVGI receives follow-up DUV order....

biz.yahoo.com

Aloha



To: Tulvio Durand who wrote (11327)12/10/1997 1:28:00 PM
From: Yakov Lurye  Read Replies (1) | Respond to of 25960
 
Tulvio, I think that your interpretation is correct. I saw a similar statement re: future mix-and-match of e-beam and DUV. To minimize the equipment cost, only critical layers are produced on a more expensive machine.

Since mix-and match ratio is chip-design dependent, mix-and-match approach is best suited for commodity-type mass production, e.g.,
64 SDRAMs.

Regards,

Y.


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