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To: Yakov Lurye who wrote (11332)12/10/1997 4:03:00 PM
From: Tulvio Durand  Read Replies (1) | Respond to of 25960
 
It seems then that true DUV 0.25 nm production has not yet arrived, given the "mix and match" nature of the present 0.25 nm IC production. Also the throughput of 85 wafers/hr is for a partial production only. When other steps in "mix and match" process are accounted the throughput maight drop to 40/hr or less. Do you agree? Tulvio