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To: Yakov Lurye who wrote (11410)12/11/1997 8:31:00 PM
From: James Word  Read Replies (1) | Respond to of 25960
 
RE: DUV vs. i-line cost

The biggest cost increase going from DUV to i-line is in the consummables. Primarily photoresist, which is ~$1000/gal for i-line
and ~$2000/gal for DUV. The excimer laser gobbles up gas and requires
more expense to operate. DUV steppers cost about 5 to 6 million.
and i-line stepper is more like 4 million. The resist track for coat/develop also costs a bit more due to the necessary filters required for chemically amplified resist.

James Word