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Politics : Formerly About Advanced Micro Devices -- Ignore unavailable to you. Want to Upgrade?

To: Yousef who wrote (27027)	12/20/1997 8:37:00 PM
From: Bill Jackson	Read Replies (1) \| Respond to of 1579961

If they only need four stages with the deep UV I see the logic. Are there several lines in parallel?, or is it unlike the auto analog, and there is not a continuous path, instead a batch continuous path, with a bunch of wafers exposed at machine 1, then placed in a carrier and taken to machine 2 for the next stage, and so on.Each carrier full being completed and then placed to an in process stack of carriers. There might be 10 machines at stage 2(say,slow) but only 2 at stage 1 as each one is 5 times as fast as a stage 2 step.They would then adjust the number of machines at each stage to keep a similar finished goods flow rate. When there is an earth tremor do all these machines get disturbed in accuracy and have to go through a phase of focussing and alignment? At these submicron alignments do they self align with wafer targets, or work to an in machine reference. How deep is the field on the DUV, and the length over which they focus, what are the lenses made from?, or do they use reflection optics from specular surfaces?, are they water sensitive. Bill