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Politics : Formerly About Advanced Micro Devices -- Ignore unavailable to you. Want to Upgrade?


To: Bill Jackson who wrote (27028)12/20/1997 8:53:00 PM
From: Yousef  Read Replies (1) | Respond to of 1580006
 
Bill,

Re: "There might be 10
machines at stage 2(say,slow) but only 2 at stage 1 as each one is 5 times as fast as a
stage 2 step.They would then adjust the number of machines at each stage to keep a
similar finished goods flow rate."

That is exactly correct ... One must determine machine thruput and then
purchase enough to eliminate "bottlenecks". At any one step, there are
a number (probably minimum of 3) machines that can do the same job, so
if one goes down, the entire line is not down. But as I stated before,
much of this equipment can be used at .25um.

Re: "How deep is the
field on the DUV, and the length over which they focus ..."

The maximum field size on a stepper will produce a chip that is 22mm X 22mm ... also
the depth of focus is about 1 - 2 microns.

Hope this helps.

Make It So,
Yousef