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To: Ian@SI who wrote (4331)1/6/1998 11:49:00 AM
From: Rob-Chemist  Respond to of 10921
 
ADC is presumably automatic defect classification. KLAC has had software for doing this for a couple of years now, so it will be interesting to see how AMATs offering compares.



To: Ian@SI who wrote (4331)1/6/1998 11:51:00 AM
From: Scott Brooks  Read Replies (1) | Respond to of 10921
 
Ian,

If you have access to AOL (non-website), the KLA board on the MF features a K-T employee that explains the situation. I think he said that their app is not CD SEM. I still think it is none too good for K-T.

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