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To: Yakov Lurye who wrote (13051)1/23/1998 4:57:00 PM
From: Mr. Aloha  Respond to of 25960
 
That's pretty deep... good discussion and more focused than the last 15 messages :-)

In laymans terms... I think they have the I-line.. and don't have the DUV so now they order the DUV's to work with the I-line. They stick in the wafer to do the basic layout and then switch to the DUV to do the fine work.

Whooooo my fingers are sore typing that all in...

Is that correct?

Aloha



To: Yakov Lurye who wrote (13051)1/23/1998 5:04:00 PM
From: FJB  Read Replies (2) | Respond to of 25960
 
Y.,

VLSI is forecasting 50% DUV shipments for 1998(80% by 2001). Dataquest is forecasting 462 of 1007 steppers being DUV in 1998. 64Mb DRAM require DUV for TWICE as many layers as complex MPUs.

Bob


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