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To: Paul Dieterich who wrote (13089)1/26/1998 11:47:00 AM
From: flickerful  Respond to of 25960
 
paul, thanks for the post.<eom>



To: Paul Dieterich who wrote (13089)1/26/1998 11:56:00 AM
From: Yakov Lurye  Read Replies (4) | Respond to of 25960
 
Fujitsu will switch to .22um in DRAM production by the end of the year, skips .28um step

nikkeibp.asiabiztech.com

Could 248nm lasers be used for .21 -.22 production, or are we talking about 193nm?