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To: Yakov Lurye who wrote (13091)1/26/1998 12:22:00 PM
From: olduvai5  Respond to of 25960
 
Probably need to go to 193nm.

olduvai5



To: Yakov Lurye who wrote (13091)1/26/1998 1:30:00 PM
From: C E D  Respond to of 25960
 
<<<Could 248nm lasers be used for .21 -.22 production, or are we talking about 193nm?>>>

248nm lasers should be able to go down to .18 micron, also there are no production capable 193nm lasers, probably not for a couple of years yet.

Ed



To: Yakov Lurye who wrote (13091)1/26/1998 2:04:00 PM
From: James Word  Read Replies (1) | Respond to of 25960
 
Yakov: RE 0.22um at 248nm
Since 193nm steppers don't exist in large numbers they will use 248nm
lasers. Canon's next generation Excimer Stepper is spec'd for 0.22um
production and will ship near the end of the year. Even existing
equipment is probably capable though.

Don't forget that DRAM manufacturers have many tricks that they can
use like phase shift and off axis. These aren't available to logic
producers like Intel or TI.

James Word



To: Yakov Lurye who wrote (13091)1/26/1998 2:18:00 PM
From: Zeev Hed  Read Replies (4) | Respond to of 25960
 
Yakov, something is not right in the Kingdom of Denmark. We are three days from the earning report, Unfrastructure had just published a relatively bullish outlook for the sector and particularly the DUV players, yet, the stock is within 1/2 a buck of the yearly low and the volume is tepid. Usually, if the earnings would be a surprise, the stock would start and show some action by now. W cannot even blame Asia that was up overnight, or even the market in general which is still up (barely) on the day. As I often say, when there is a dichotomy between the apparent good fundamentals and the actual technical behavior of a stock, put more weight on the technical and expect the true fundamentals to ve reassessed down in line with the technical behavior.

Zeev