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Technology Stocks : Cymer (CYMI) -- Ignore unavailable to you. Want to Upgrade?


To: BillyG who wrote (14725)2/17/1998 12:22:00 PM
From: Tulvio Durand  Read Replies (1) | Respond to of 25960
 
I wonder if the improved alignment accuracy upgrade will allow upgrading of older Nikon steppers to CYMI lasers?.. My guess is that Nikon is improving the field registration accuracy of the 5X reduction i-line steppers which is needed for mix-and-match, combination i-line/DUV, wafer printing. The problem is described in (and subsequent link): Message 3375179 I don't believe that retrofitting i-line tools with DUV lasers is practical. But I sure wish someone would tell me I'm wrong. Tulvio