To: Andrew Vance who wrote (15000 ) 2/25/1998 1:05:00 PM From: D. K. G. Read Replies (1) | Respond to of 25960
February 15th edition of Laser Report (An industry newsletter published by Laser Focus World.): GERMANY--A two-and-one-half-year joint venture by Lambda Physik and Matsushita Research Institue Tokyo has resulted in an extremely pure laser source of 0.18 um featuer excimer based lithography. The new krypton-fluoride laser incorporates the laser technology of Lambda Physik and Matsushita's advanced resonator design. Matsushita had the resonator but lacked the laser source. The laser emits a beam at 248 nm wavelength with a spectral linewidth of 0.6 pico-meters, which is the purest to date in the industry, according to Lambda Physik's president, Dirk Basting. he says, "You can print very fine lines if your can achieve very low cromatic dispersion. And you must concentrate the energy around 0.6 pm or the lithographic contrast ratio will decline." The new laser is said to meet these challenges. It is possible to achieve more linewidth purity, but Basting suggets only limited benefits may follow. Intitally the laser system will be manufactured at the company's headquarters in Germany, with shipment to stepper manufacturers set to begin in March. Manufacturing could be moved to Japan if sales warrant. The system should sell for approximately $500,000 per unit, and find use in manufacturing 256-Mbit and 1-Gbit DRAM chips. Basting says Lambda Physik also has achieved excellent performance in next-generation argon-fluoride laser technology emitting at 193-nm wavelength and fluoride laser technology emitting at 157 nm." END OF ARTICLE ------------------------------------------------------- I got this article off the yahoo CYMI board. How does this compare with exsisting Cymer lasers - technogoly wise. L-P unit is priced @500K, about 60K more than ASP of Cymer's units. Will this give Cymer the ability to rise its prices? This ability to increase the price in the future was alluded to in the most recent C.C. Thanks for your previous and future commentary, it's great ! Denis