To: D. K. G. who wrote (15025 ) 2/25/1998 1:19:00 PM From: Andrew Vance Read Replies (2) | Respond to of 25960
Bummer!! Reading this reminded me that I either let my subscription run out or it was never forwarded to my home address. As far as the comparisons are concerned, I still believe Lamda Physik has a long road to go down in order to ramp up production of these types of lasers and to deliver in the quantities required. then they have to go through extensive qualification at both the stepper manufacturer and the end user facilities. They might also need to design or re-design the stepper interface to integrate the laser/source. Even with this said, the field is open for competition and it should not dramatically affect CYMI. To CYMI's credit, they have additional manufacturing capacity already in place that they can ramp. IF things get to competitive for them, CYMI could conceivably try to acquire the technology from Lamda Physik. Remember, Lamda Physik may not want to get into the high volume market, given its history. Also, we must consider that as good as the laser may be, as described in the article, it is still for 0.18u lithography. CYMI is already into the 248nm and 193nm lasers and beyond. I posted the 0.08u article this year and we know from the CC that CYMI will introduce 2 new lasers this year that will extend the technological capabilities. While I cannot confirm this, I think the Univ of Texas / SEMATECH breakthrough might have had the first of these new lasers as part of the DUV system. I say that to be conservative, meaning that we may only see 1 more type of advanced laser out this year. It would make good sense to allow Grant Willson, UT-Austin, and Sematech alpha or beta test the new lasers. You couldn't put it in more capable and impressive hands especially if it is part of the ISI stepper. Andrew