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To: Tulvio Durand who wrote (1444)	3/5/1998 11:57:00 PM
From: FJB	Read Replies (1) \| Respond to of 2946

Tulvio, RE:So I don't see how SVGI has something that's unique here. Good question, Steve, and I should have characterized that when I went into it. Because of the unique design of the SVGI microscan scanner, it does not require an incredibly narrow bandwidth from the laser. It can take a wider color emission from the light source. And that makes life wonderful, for the laser. The laser can operate much more efficiently, much more robustly, with less sensitivity to the parameters of the laser which would otherwise create instabilities. So .. (3-second gap in recording of conference call). certain stability as consistent with stepper operation because of that. The machines that are now either on the market or being developed by ASML, Nikon or Canon, which use lens projection systems instead of mirrors, require the very narrow bandwidth operation and, in addition, a level of stability that is not characterized today, that doesn't characterize those narrow-band lasers. It's that narrow-bandedness which put the laser into a difficult operating mode. https://www.siliconinvestor.com/readmsg.aspx?msgid=2213139 Product literature The patented catadioptric projection optics mixes refractive and reflective optics. The subsystem is more compact and much less sensitive to changes in ambient temperature and pressure than refractive-only optics. ... The combination of the Micrascan scanning stages and the catadioptric optical design has created a new standard in overlay performance. Lens distortion, a major element in the overlay error budget, has been reduced to < ñ30 nm over the entire exposure field. Low distortion combined with ultrastable and precise stage motion enable tighter machine-to-machine overlay. ... You can count on getting the resolution you require-with greater process latitude. The Micrascan's ñ1% illumination uniformity and dose control, combined with broadband illumination, provide greater line width control. This allows you to use tighter design rules. ... More die per exposure field minimizes yield loss caused by particulates on the reticle. For even higher flexibility and throughput, the Micrascan exposure field can be expanded to 22 x 50 mm through the use of 9 inch reticles. svg.com I hear that the catadioptric lens system provides better CD control and it also allows the Micrascan to acheive finer resolutions then possible with other i-line systems. For instance, Intel is getting sub-0.25 drawn gate lengths using a Micrascan i-line system. The aspheric optics technology(which SVGL has in house - Tinsley Labs) is also crucial for 193nm photolithography since the transparency of "glass" materials is not good with these wavelengths and is absolutely NECESSARY for EUV. As always, I'd like to hear from the experts on whether this is accurate or not. Bob PS Cymer now has 260 laser being used in production according to today's press release.

To: Tulvio Durand who wrote (1444)	3/6/1998 10:16:00 AM
From: Ian@SI	Respond to of 2946

Tulvio, SVGI has had this technology since it picked up the remains from P-E near 1989. It has had it working successfully in production on Fab floors for the better part of a decade. Komatsu has an excimer laser. How many Komatsu lasers are in production steppers on fab floors? The same analogy applies to step and scan with SVGI vs the competitors. Ian

To: Tulvio Durand who wrote (1444)	3/8/1998 9:37:00 PM
From: LLCF	Read Replies (1) \| Respond to of 2946

< I understand the orthogonality argument, and agree with your explanation. But I don't believe that the stepper/scanner is unique to SVGI. ASM also makes stepper/scanners, and I believe that Nikon and Canon make them as well. So I don't see how SVGI has something that's unique here. > 1.) SVGI's "step and scan" technology is supposedly ahead of the competition according to their CEO Papken der Terossian... having a larger field of view and more accuracy for lithography of the "critical layers" 2.) In Cymers conference call last fall Cymers ceo also made comments about SVGI's unique technology allowing the current available light sources (as opposed to cymers new source coming out this year) to go to lower u linewidths than the competition. He did not elaborate why this was possible. 3.) I also read on the "General Lithography" thread months ago something about a patented way the SVGI parts offsetting movement lowers vibration levels or some such thing... cant substantiate, and don't know of any patent that is critical to their supposed advantage. 4.) Cannon and Nikon have stated that they have had production problems with their scanners. Havent elaborated. I don't believe they have advanced machines (competion to SVGI's scanners) on a production basis. 5.) SVGI has shipped WAY more of these advanced machines for critical layers than anyone including ASMLF which I believe shipped their first production machine within the last 6 months All this said... I've also heard people including Terossian talk of SVGI's lead in terms of time... implied IMO that others would catch up. That was 6-9 months ago... head time frames as low as a 1 year advantage which may be all but gone now. "Whew".... all this is from memory please point out any mistakes folks. DAK