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To: FJB who wrote (1445)	3/6/1998 1:13:00 AM
From: Tulvio Durand	Read Replies (1) \| Respond to of 2946

Thanks, Bob, for the reference material and explanation. I appreciate the uniqueness and superiority of SVGI's mirrors vs. lenses used by other vendors in being able to use a wider beamwidth to print smaller dimensions, etc. My question was in relation to the claimed SVGI unique large-field scan, viz., item B from Ian's post. 2. Technology: I believe that SVGI has at least 2 proven advantages. A. Its optics allow more light to be delivered to the wafer causing shorter times to expose the photoresist. B. Its scanning technology was also unique, permitting larger fields to be exposed with higher yields. Are you saying that [B] is also an advantage from using mirror instead of lens optics? Or is it because there is a unique scan pattern or process? I'll have to study the materials some more. Thanks, Tulvio