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Technology Stocks : General Lithography -- Ignore unavailable to you. Want to Upgrade?


To: TI2, TechInvestorToo who wrote (938)3/23/1998 12:15:00 PM
From: TI2, TechInvestorToo  Respond to of 1305
 
Mo CANON stepper news, seems like a me too product:
Message 3804668



To: TI2, TechInvestorToo who wrote (938)3/23/1998 1:41:00 PM
From: Katherine Derbyshire  Read Replies (1) | Respond to of 1305
 
The new Canon stepper is probably this one (press release this morning):

FPA-3000i5+ Specifications

Lens Magnification 5:1 Reduction Ratio
NA 0.45-0.63 Variable
Resolution Less than 0.35 micron
Exposure Field 22 x 22mm
Illumination 365nm
Wafer Size Maximum 8 inches
Reticle Size 6 inches
Alignment Accuracy Less than 40nm (|m|+3sigma)
Throughput 100 WPH (8-inch wafer, 90mJ/cm2)

Another high throughput, mix-and-match i-line tool.

Katherine