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To: TI2, TechInvestorToo who wrote (16386)4/7/1998 12:36:00 PM
From: Paul Dieterich  Read Replies (1) | Respond to of 25960
 
Does anyone have a subscription to Semiconductor Manufacturing Equipment? I don't and cannot read this story:

[http://www.newspage.com/browse/46545/46548/633/]

Austin reports 0.08-micron device; pilot lines could emerge in '99 -- Researchers plumb depths below 0.1 micron

Santa Clara, Calif. - Semiconductor-equipment makers are hunkering down to tackle the physics problems associated with ultradeep-submicron IC manufacturing.

[CMP Publications, 638 words]