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Technology Stocks : Speedfam [SFAM] Lovers Unite ! -- Ignore unavailable to you. Want to Upgrade?

To: Mr. Sam who wrote (2942)	4/16/1998 4:24:00 PM
From: Nick Michell	Read Replies (1) \| Respond to of 3736

Applied adds tungsten CMP process techweb.cmp.com Any thoughts on how SpeedFam's product compares for this application. I was particularly interested in this statement: "The Mirra's design uses Applied's in situ rate monitor technology, called ISRM, to precisely stop the polishing process when it reaches the thin oxide dielectric layer under the tungsten. The ISRM technology is intended to minimize overpolishing and control plug recess within less than 200 angstroms."