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To: Rob-Chemist who wrote (1886)4/17/1998 3:20:00 PM
From: Clarksterh  Read Replies (2) | Respond to of 5867
 
Rob - one can often do a shrink without any new equipment.

Although this is hardly my area of expertise, I do realize that much. However, my point is that at some point those etchers, CVD, furnaces, ... you bought for 0.5 microns just aren't going to work any more. At a guess I would expect that to happen when the line widths drop to a little less than 1/2 of what the machines were originally bought for. (Do you have more detailed info - for instance, what tends to go obsolete first, second, ... . And at what shrink points?)

Clark