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Technology Stocks : Intel Corporation (INTC) -- Ignore unavailable to you. Want to Upgrade?

To: Paul Dieterich who wrote (55369)	5/11/1998 12:53:00 PM
From: Paul Engel	Read Replies (1) \| Respond to of 186894

Paul - Re: " Would you happen to know which lightsource Intel is using during the present upgrade to .25 linewidths --- the traditional SVGI mercury bulb (Micrascan II) technology, or the excimer laser lightsource?" According to all the past references, Intel is using a Mercury Bulb, 250 nM light source for 0.25 micron lithography with the Micrascan II units - they may also be using some Nikons by now, but I have no confirmation of that. For their next generation 0.18 micron process, the KrF Excimer laser source will most likely be the source - as used on the MicraScan III. Intel should be starting some 0.18 micron product runs late this year and early next year - with Merced and Coppermine in the development pipelines. Paul